Beneq Group’s holdings include Beneq Oy, a forerunner in industrial production using atomic layer deposition; and Lumineq Oy, an innovator in display technology. Both Beneq and Lumineq are fully owned by Beneq Group.

Beneq is the home of atomic layer deposition. In 1984, we established the world’s first industrial production using ALD. Today, we lead the market with products for R&D (TFS 200, TFS 500, R2), semiconductor device fabrication (Transform TM), 3D and batch production (P400A, P800, P1500), ultra-fast spatial ALD (C2R), and roll-to-roll ALD (Genesis).


Lumineq Oy is a premium manufacturer of the world’s most rugged and transparent displays based on thin film electroluminescent technology. LUMINEQ transparent displays improve situational awareness of optical devices and vehicle safety by bringing dynamic information to the line of sight. They also empower automotive manufacturers to deliver premium travel experience by turning vehicle windows into touch displays.